EQP 500 HIDEN Analytical Mass Spectrometer

EQP 500 HIDEN Analytical Mass Spectrometer,

• mass spectra range 0 - 500 amu,
• triple filter quadrupole mass analyser,
• ion counting detector of seven decades continuous dynamic range,
• sub PPM detection of plasma ions, neutrals and radicals,
• energy resolution better than 0.25 eV FWHM,
• orifice input diameter 100 - 300 μm.