Rozcestník experimentálního vybavení pro fyziku a materiálové vědy
Plasma Enhanced Linear Microwave Chemical Vapour Depostion system
This unique Plasma Enhanced Linear Microwave CVD reactor for growth of thin films is used for production of diamond (typically NCD) coatings uniformly spread over large areas.
Section:
2
Department:
18
Contact person:
Andrew Taylor
Phone number:
266052634
E-mail:
Room:
S195
Number:
2