Electron probe X-ray microanalyzer JEOL JXA-733 is scanning electron microscope equipped with three wave-length dispersive spectrometers (WDS) and one energy-dispersive spectrometer (EDS) allowing for observation of samples in secondary and back scattered electrons, qualitative and quantitative analysis of chemical elements, EBSD detector for crystal orientation mapping of polycrystalline samples and Electron Beam Induced Currents (EBIC) imaging.