Roth&Rau AK 400 - the simulated reactor

Roth&Rau AK 400 - the simulated reactor:

Large area linear antenna pulsed MW plasma enhanced CVD system combined with RF substrate bias (AK 400 Roth and Rau, GmbH). Different carbon allotrope forms like micro- and nanocrystalline or nanoporous diamond, carbon nanotubes, graphene and others may be grown by the proper substrate choice and pre-treatment and gas mixture composition. Surface termination or functionalization (hydrogenation, oxidation, fluorination) is also possible in this apparatus.