EQP 500 HIDEN Analytical Mass Spectrometer

EQP 500 HIDEN Analytical Mass Spectrometer,

  • mass spectra range 0 - 500 amu,
  • triple filter quadrupole mass analyser,
  • ion counting detector of seven decades continuous dynamic range,
  • sub PPM detection of plasma ions, neutrals and radicals,
  • energy resolution better than 0.25 eV FWHM,
  • orifice input diameter 100 - 300 μm.

Category:

Number: 
4
Section: 
4
Department: 
28
Contact person: 
Petr Pokorný
Phone number: 
+420266052719
Room: 
163