AIX P6 - Aixtron AG - the simulated reactor

AIX P6 - Aixtron AG - the simulated reactor:

Small area focused plasma MW enhanced CVD system, up to 3inch substrate , 6kW power (AIX P6 - Aixtron AG). Different carbon allotrope forms like micro- and nanocrystalline or nanoporous diamond, carbon nanotubes, graphene and others may be grown by the proper substrate choice and pre-treatment and gas mixture composition. Surface termination or functionalization (hydrogenation, oxidation) is also possible in this apparatus.